The MEMSMap 510 illuminates the target area with an xpanded laser beam, while the object is imaged by a microscopic objective onto a CMOS sensor array. For out-of-plane easurements, an internal reference beam is used to interfere with the object light. For in-plane-measurements, two laser beams are used for object illumination.For vibration measurements the system computer uses a signal generator to drive an excitation device, and the target object is excited over a frequency range. Vibration amplitude fringes can be displayed in real-time, while a unique recording algorithm is used to calculate numerical amplitude and phase maps. For static deflection measurements the Optonor technology is based on phase shifting to record and calculate static deflections of the object under investigation.